Number of the records: 1

Modification of the Schottky FE ZrO/W electron emitter

SYSNO ASEP	0352423
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Modification of the Schottky FE ZrO/W electron emitter
Author(s)	Matějka, František (UPT-D)_{RID, SAI} Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Král, Stanislav (UPT-D)_{RID, SAI}
Number of authors	4
Source Title	Proceedings of the 17th IFSM International Microscopy Congress. - Rio de Janeiro : Sociedade Brasileira de Microscopia e Microanilise, 2010 - ISBN 978-85-63273-06-2
Pages	i1.12: 1-2
Number of pages	2 s.
Action	International Microscopy Congress (IMC17) /17./
Event date	19.09.2010-24.09.2010
VEvent location	Rio de Janeiro
Country	BR - Brazil
Event type	WRD
Language	eng - English
Country	BR - Brazil
Keywords	e-beam writing system ; rectangular-shaped electron beam ; point projection
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	FR-TI1/576 GA MPO - Ministry of Industry and Trade (MPO)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2011

Number of the records: 1