Number of the records: 1

Low Energy Reflection and High Angle Reflection of Electrons in the SEM

SYSNO ASEP	0352416
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Low Energy Reflection and High Angle Reflection of Electrons in the SEM
Author(s)	Mikmeková, Šárka (UPT-D)_{RID, SAI, ORCID} Hovorka, Miloš (UPT-D) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Number of authors	4
Source Title	Proceedings of the 17th IFSM International Microscopy Congress. - Rio de Janeiro : Sociedade Brasileira de Microscopia e Microanilise, 2010 - ISBN 978-85-63273-06-2
Pages	i3.7: 1-2
Number of pages	2 s.
Action	International Microscopy Congress (IMC17) /17./
Event date	19.09.2010-24.09.2010
VEvent location	Rio de Janeiro
Country	BR - Brazil
Event type	WRD
Language	eng - English
Country	BR - Brazil
Keywords	scanning electron microscopy ; crystallinic structure ; slow backscattered electrons
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	OE08012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	An important role of the scanning electron microscopy (SEM) is to image and examine the local crystallinic structure of materials. As an alternative to the traditional EBSD method, suffering from slow data collection and limited lateral resolution, employment of very slow backscattered electrons (BSE) and of BSE leaving the sample at high angles with respect to the surface normal appears very promising. Neither of these signals is available in conventional SEM devices as the former species have insufficient energy to be detected while the later usually miss the detector.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2011

Number of the records: 1