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Laser source for interferometry in nanotechnology

SYSNO ASEP	0352207
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Laser source for interferometry in nanotechnology
Author(s)	Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI}
Number of authors	4
Source Title	17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proceedings of SPIE Vol. 7746). - Bellingham : SPIE, 2010 - ISBN 978-0-8194-8236-5
Pages	77461i: 1-6
Number of pages	6 s.
Action	Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics /17./
Event date	06.09.2010
VEvent location	Liptovsky Jan
Country	SK - Slovakia
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	atomic force microscopy ; nanometrology ; interferometry
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO)
	FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO)
	2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	GA102/07/1179 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000291389400054
Annotation	The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. The laser stabilization technique is described together with comparison of frequency stability.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2011

Number of the records: 1