Number of the records: 1

Laser interference nano-comparator for length sensor calibration in nanometric scale

SYSNO ASEP	0352200
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Laser interference nano-comparator for length sensor calibration in nanometric scale
Author(s)	Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Mikel, Břetislav (UPT-D)_{RID, SAI} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Šmíd, Radek (UPT-D)_{RID, SAI} Buchta, Zdeněk (UPT-D)_{RID, SAI, ORCID} Lazar, Josef (UPT-D)_{RID, ORCID, SAI}
Number of authors	6
Source Title	2nd International Conference NANOCON 2010. - Ostrava : Tanger s.r.o, 2010 - ISBN 978-80-87294-19-2
Pages	s. 274-277
Number of pages	4 s.
Action	NANOCON 2010. International Conference /2./
Event date	12.10.2010-14.10.2010
VEvent location	Olomouc
Country	CZ - Czech Republic
Event type	EUR
Language	eng - English
Country	CZ - Czech Republic
Keywords	nanoscale ; precise measurement ; laser ; interferometer
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	FR-TI1/241 GA MPO - Ministry of Industry and Trade (MPO)
	GAP102/10/1813 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000286656400046
Annotation	In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of the measuring probe is in order of nanometers. The gauge works fully self-controlled and it is equipped by control software which is able to calibrate wide area of transducers. We put main stress to compensating of thermal dilatation of the gauge body and to eliminating of imperfection of linear guide ways which are used for positioning of the testing probe of the gauge. The work presents the first records of scale calibration of an incremental transducer.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2011

Number of the records: 1