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Laser Source for Interferometry in Nanometrology
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SYSNO ASEP 0352194 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Laser Source for Interferometry in Nanometrology Author(s) Hrabina, Jan (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAISource Title Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications. - Ottawa : International ASET, 2010 - ISBN 978-0-9867183-0-4 Pages 541: 1-6 Number of pages 6 s. Action Nanotechnology: Fundamentals and Applications Event date 04.08.2010-06.08.2010 VEvent location Ottawa Country CA - Canada Event type WRD Language eng - English Country CA - Canada Keywords nanometrology ; AFM microscopy ; interferometry Subject RIV BH - Optics, Masers, Lasers R&D Projects LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. We have decided for a frequency-doubled Nd:YAG laser with thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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