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3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB)

SYSNO ASEP	0351718
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB)
Author(s)	Hradilová, Monika (FZU-D) Jäger, Aleš (FZU-D)_{RID, ORCID} Lejček, Pavel (FZU-D)_{RID, ORCID, SAI}
Source Title	Metal 2010 - 19th international conference on metallurgy and materials. - Ostrava : Tanger s.r.o, 2010 - ISBN 978-80-87294-15-4
Pages	s. 152-153
Number of pages	2 s.
Action	Metal 2010
Event date	18.05.2010-20.05.2010
VEvent location	Rožnov pod Radhoštěm
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	scanning electron microscopy ; focused ion beam ; 3D characterization
Subject RIV	BM - Solid Matter Physics ; Magnetism
CEZ	AV0Z10100520 - FZU-D (2005-2011)
Annotation	The possibilities of analysis can be enhanced by utilizing focused ion beam (FIB). The FIB instrument allows revealing the structure in the third dimension by controlled and precise milling of the material. In combination with electron beam and suitable detector is possible to describe crystallography (EBSD) or chemical composition (EDS) etc. in three dimensions (3D). Thus, it is feasible to define real size, shape and distribution of microstructure features such as grains, grain boundaries, phases, precipitates and micropores.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2011

Number of the records: 1