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Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth
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SYSNO ASEP 0351617 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Author(s) Novotný, Michal (FZU-D) RID, ORCID, SAI
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Lančok, Ján (FZU-D) RID, ORCID
Pokorný, Petr (FZU-D) RID, ORCID, SAI
Bodnár, Michal (FZU-D)
Piksová, K. (CZ)Source Title Nanostructured Thin Films III. - Bellingham : SPIE, 2010 / Martin-Palma R.J. ; Jen Y.-J. ; Lakhtakia A. - ISSN 0277-786x - ISBN 9780819482624 Pages 7766ou/1-7766ou/8 Number of pages 8 s. Action Nanostructured Thin Films III Event date 04.08.2010-05.08.2010 VEvent location San Diego Country US - United States Event type WRD Language eng - English Country US - United States Keywords aluminium ultra thin film ; magnetron sputtering ; in-situ monitoring ; electrical conductivity ; spectral ellipsometry ; optical emission spectroscopy Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN400100653 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P324 GA ČR - Czech Science Foundation (CSF) IAA100100729 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100522 - FZU-D (2005-2011) Annotation Ultrathin nanostructured metal films exhibit unusual properties and performances. Film functional properties depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions. Hence, in order to control the nanostructure of aluminium thin film fabricated by RF magnetron sputtering, we focus on in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on a spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline function) are suggested to evaluate the data obtained from the monitoring techniques. The results of the in-situ monitoring are correlated with SEM analyses. We demonstrate the monitoring can distinguish the growth mode in the real-time. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2011
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