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Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina

SYSNO ASEP	0351378
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina
Author(s)	Pokorný, Petr (FZU-D)_{RID, ORCID, SAI} Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Lančok, Ján (FZU-D)_{RID, ORCID} Musil, Jindřich (FZU-D)_{RID, ORCID} Novotný, Michal (FZU-D)_{RID, ORCID, SAI}
Source Title	Plasma Processes and Polymers. - : Wiley - ISSN 1612-8850 Roč. 7, č. 11 (2010), s. 910-914
Number of pages	5 s.
Language	eng - English
Country	DE - Germany
Keywords	aluminium oxide ; ion-energy distribution function ; magnetron ; mass spectrometry ; pulsed discharges
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	KAN400100653 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GP202/09/P324 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000285212000004
DOI	10.1002/ppap.201000064
Annotation	The paper is devoted to the investigation of ion composition of plasma of dc pulsed magnetron discharge generated by a magnetron with Al target in an Ar/O2 mixture. The magnetron discharge was investigated in the non-reactive, metallic and oxide mode of sputtering using a mass spectrometer. The amount and energies of neutral oxygen atoms O,positive O+ and O2+ ions, and negative O- and O2- ions were measured as a function of oxygen flow rate φO2, magnetron voltage Ud and constant power Pd=400W delivered to the magnetron discharge, repetition frequency of pulses f=10 kHz and the ratio of O2 and Ar flow rates φO2=φAr. The content of ions and radicals in magnetron discharge is compared with optical spectroscopy measurements. The obtained results give a deeper insight into reactive magnetron sputtering of oxide films.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2011

Number of the records: 1