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Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model
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SYSNO ASEP 0350874 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model Author(s) Navrátil, Z. (CZ)
Dvořák, P. (CZ)
Brzobohatý, Oto (UPT-D) RID, ORCID, SAI
Trunec, D. (CZ)Number of authors 4 Source Title Journal of Physics D-Applied Physics. - : Institute of Physics Publishing - ISSN 0022-3727
Roč. 43, Nov 3 (2010), 505203:1-11Number of pages 11 s. Language eng - English Country GB - United Kingdom Keywords electron temperature ; electron density ; optical emission spectroscopy ; collisional–radiative model Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects GA202/07/1669 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000284942800007 DOI 10.1088/0022-3727/43/50/505203 Annotation A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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