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Transmission mode in scanning low enery electron microscope

SYSNO ASEP	0350667
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Transmission mode in scanning low enery electron microscope
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Hovorka, Miloš (UPT-D) Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Number of authors	3
Source Title	Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. - ISBN 978-80-254-6842-5
Pages	s. 41-42
Number of pages	2 s.
Action	International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./
Event date	31.05.2010-04.06.2010
VEvent location	Skalský dvůr
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	cathode lens ; SEM ; transmitted electron mode
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000290773700015
Annotation	We incorporated the cathode lens (CL) principle, well known from the emission microscope, to the SEM in order to operate at very low landing energies. The primary beam electrons of several keV are decelerated to nearly zero energy of landing on the specimen negatively biased to high potential. Reflected electrons are collected on a grounded detector situated above the sample but the same can be done below the sample of a fair transparency for electrons. High collection efficiency and high amplification of both detectors is secured thanks to the cathode lens field. We use a scintillation detector for the reflected mode and a semiconductor structure for the transmitted electron (TE) mode. In this arrangement resolution of few nm is obtainable across the full energy range.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2011

Number of the records: 1