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Electron optical properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens
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SYSNO ASEP 0350659 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Electron optical properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Hovorka, Miloš (UPT-D)
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 3 Source Title Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. - ISBN 978-80-254-6842-5 Pages s. 21-22 Number of pages 2 s. Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./ Event date 31.05.2010-04.06.2010 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords cathode lens ; PEEM ; LEEM ; SEM ; EOD software Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000290773700007 Annotation Cathode lens (CL) is an electron optical element commonly used in the photo-emission electron microscopy (PEEM), low energy electron microscopy (LEEM) and last but not least in the scanning electron microscopy (SEM). We have used the EOD software for calculation of aberration coefficients for the sequential and overlapped fields. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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