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Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system
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SYSNO ASEP 0349454 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system Author(s) Fendrych, František (FZU-D) RID, ORCID, SAI
Taylor, Andrew (FZU-D) RID, ORCID
Peksa, Ladislav (FZU-D) RID
Kratochvílová, Irena (FZU-D) RID, ORCID, SAI
Vlček, J. (CZ)
Řezáčová, V. (CZ)
Petrák, V. (CZ)
Kluiber, Z. (CZ)
Fekete, Ladislav (FZU-D) RID, ORCID
Liehr, M. (DE)
Nesládek, M. (BE)Source Title Journal of Physics D-Applied Physics. - : Institute of Physics Publishing - ISSN 0022-3727
Roč. 43, č. 37 (2010), 374018/1-374018/6Number of pages 6 s. Language eng - English Country GB - United Kingdom Keywords nanodiamond, ; thin films ; PE MW CVD ; linear antennas Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects KAN200100801 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN300100801 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100520 - FZU-D (2005-2011) UT WOS 000281544100019 DOI 10.1088/0022-3727/43/37/374018 Annotation Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 – CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2011
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