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Laser Induced Breakdown Spectroscopy of Germane Plasma Induced by IR CO2 Pulsed Laser
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SYSNO ASEP 0345105 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Laser Induced Breakdown Spectroscopy of Germane Plasma Induced by IR CO2 Pulsed Laser Author(s) Santos, M. (ES)
Diaz, L. (ES)
Camacho, J.J. (ES)
Poyato, J.M. (ES)
Pola, Josef (UCHP-M) RID, ORCID, SAI
Křenek, Tomáš (UCHP-M)Source Title Applied Physics A - Materials Science & Processing. - : Springer - ISSN 0947-8396
Roč. 88, č. 4 (2010), s. 811-821Number of pages 11 s. Language eng - English Country DE - Germany Keywords laser breakdown spectroscopy ; germane ; gas-breadown Subject RIV CF - Physical ; Theoretical Chemistry CEZ AV0Z40720504 - UCHP-M (2005-2011) UT WOS 000278519700020 DOI 10.1007/s00339-010-5592-5 Annotation Laser-induced breakdown spectroscopy in germane at room temperature and pressures was studied using a high-power TEA CO2 laser. The strong emission spectrum of the generated plasma is mainly due to electronic relaxation of excited Ge, H and ionic fragments. The physical processes leading to laser-induced breakdown of germane have been analyzed. Workplace Institute of Chemical Process Fundamentals Contact Eva Jirsová, jirsova@icpf.cas.cz, Tel.: 220 390 227 Year of Publishing 2011
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