Number of the records: 1

Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy

SYSNO ASEP	0343393
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy
Author(s)	Pavluch, J. (CZ) Zommer, L. (PL) Mašek, K. (CZ) Skála, T. (IT) Šutara, F. (CZ) Nehasil, V. (CZ) Píš, I. (CZ) Polyak, Yaroslav (UFCH-W)
Source Title	Analytical Sciences - ISSN 0910-6340 Roč. 26, č. 2 (2010), s. 209-215
Number of pages	7 s.
Language	eng - English
Country	JP - Japan
Keywords	non-evaporable getter materials ; XPS methods
Subject RIV	CF - Physical ; Theoretical Chemistry
CEZ	AV0Z40400503 - UFCH-W (2005-2011)
UT WOS	000274977700012
EID SCOPUS	77949895185
DOI	10.2116/analsci.26.209
Annotation	Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution of the NEG components during activation. The samples were prepared ex-situ by DC magnetron sputtering on a stainless-steel substrate. The ERXPS measurements were carried out at two incident photoelectron beam angles at energies of 110, 195, 251, 312, 397 and 641 eV. Besides these photon energies, also standard X-ray photoelectron spectroscopy (XPS) was used at a photon energy of 1254 eV. We accumulated Ti 3s, Ti 3p, Ti 3d, V 3s, V 3p, V 3d, Zr 3p, Zr 3d, Zr 4s, Zr 4p, Zr 4d, C 1s, O 1s and O 2s photoelectron peak intensities as functions of the kinetic energies given to them. Under simplifying assumptions, Monte-Carlo calculations of the activated sample concentration profiles were performed to fit the measured spectra intensities.
Workplace	J. Heyrovsky Institute of Physical Chemistry
Contact	Michaela Knapová, michaela.knapova@jh-inst.cas.cz, Tel.: 266 053 196
Year of Publishing	2011

Number of the records: 1