Number of the records: 1
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
- 1.
SYSNO ASEP 0343204 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide Author(s) Novotný, Michal (FZU-D) RID, ORCID, SAI
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Pokorný, Petr (FZU-D) RID, ORCID, SAI
Bočan, Jiří (FZU-D) RID
Fitl, Přemysl (FZU-D) RID, ORCID
Lančok, Ján (FZU-D) RID, ORCID
Musil, Jindřich (FZU-D) RID, ORCIDSource Title Journal of Optoelectronics and Advanced Materials. - : NATL INST OPTOELECTRONICS - ISSN 1454-4164
Roč. 12, č. 3 (2010), 697-700Number of pages 4 s. Language eng - English Country RO - Romania Keywords reactive magnetron sputtering ; alumina ; plasma spectroscopy ; mass spectroscopy ; optical emission spectroscopy Subject RIV BH - Optics, Masers, Lasers R&D Projects IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN400100653 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P324 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000277827900057 EID SCOPUS 77950638049 Annotation Optical emission spectroscopy (OES) and mass spectrometry were used for plasma investigation of DC pulsed reactive magnetron sputtering of aluminium oxide. Aluminium target was sputtered in a reactive oxygen/argon atmosphere. Special attention was paid to the transition from the dielectric to metallic mode. Mass spectra were recorded at the substrate. OES spectra were taken at the target and at the substrate. Both mass and emission spectra obtained in the transition mode revealed distinct changes in plasma composition (O, O2, Al and AlO plasma species and corresponding positive ions). The transition from the dielectric to metallic mode is followed by a decrease of atomic oxygen intensity, while the intensity of aluminium species increases. AlO molecule appeared in the mass spectra only. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2011
Number of the records: 1