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Novel approach to material evaluation of thin surface layers by resonant ultrasound spectroscopy
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SYSNO ASEP 0342304 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Novel approach to material evaluation of thin surface layers by resonant ultrasound spectroscopy Author(s) Landa, Michal (UT-L) RID
Růžek, Michal (UT-L)
Sedlák, Petr (UT-L) RID, ORCID
Seiner, Hanuš (UT-L) RID, ORCID
Bodnárová, Lucie (UT-L) RID, ORCID
Zídek, Jan (UT-L) RIDSource Title Journal of Physics: Conference Series. - : Institute of Physics Publishing - ISSN 1742-6588
Roč. 214, č. 1 (2010), s. 1-5Number of pages 5 s. Action International Conference on Photoacoustic and Photothermal Phenomena /15./ Event date 19.07.2009-23.07.2009 VEvent location Leuven Country BE - Belgium Event type WRD Language eng - English Country BE - Belgium Keywords resonant ultrasound spectroscopy (RUS) ; thin films ; DLC Subject RIV BI - Acoustics R&D Projects GA101/09/0702 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20760514 - UT-L (2005-2011) UT WOS 000287820700045 DOI 10.1088/1742-6596/214/1/012045 Annotation The laser-based modal resonant ultrasound spectroscopy is modified for measurements of thin surface layers on a substrate. This paper describes determination of all in-plane elastic properties of thin layers from small resonant frequency shifts of substrate induced by deposition of the layer. Workplace Institute of Thermomechanics Contact Marie Kajprová, kajprova@it.cas.cz, Tel.: 266 053 154 ; Jana Lahovská, jaja@it.cas.cz, Tel.: 266 053 823 Year of Publishing 2011
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