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Optical study of BST films combining ellipsometry and reflectivity
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SYSNO ASEP 0340744 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Optical study of BST films combining ellipsometry and reflectivity Author(s) Železný, Vladimír (FZU-D) RID, ORCID
Chvostová, Dagmar (FZU-D) RID, SAI, ORCID
Pajasová, Libuše (FZU-D) RID
Jelínek, Miroslav (FZU-D) RID, ORCID
Kocourek, Tomáš (FZU-D) RID, ORCID, SAI
Daniš, S. (CZ)
Valvoda, V. (CZ)Source Title Applied Surface Science. - : Elsevier - ISSN 0169-4332
Roč. 255, č. 10 (2009), s. 5280-5283Number of pages 4 s. Language eng - English Country NL - Netherlands Keywords BST thin films ; optical properties Subject RIV BM - Solid Matter Physics ; Magnetism CEZ AV0Z10100520 - FZU-D (2005-2011) UT WOS 000263865000039 DOI 10.1016/j.apsusc.2008.08.076 Annotation Optical properties of plasma laser-deposited Ba0.75Sr0.25TiO3 (BST) thin films have been investigated using variable angle spectroscopic ellipsometry (VASE) and near-normal spectroscopic reflectivity (NNSR) within a broad spectral range at room temperature. The samples prepared under various deposition conditions and the Si substrate coated with the structure SiO2/TiOx/Pt weremeasured. The Xray diffraction, atomic force microscopy and alpha step measurement were used for characterization of the samples. The platinum-coated Si substráte data were fitted as a semi-infinite medium using the Drude and Lorentz oscillators model. The structure model for optical characterization of the sample included not only the BST layers and substrate but also the intermix and surface roughness layers to achieve good agreement with experimental data. The substrate structure was modeled by a simple bulk with surface roughness. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2010
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