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Spatial coherence profilometry on tilted surfaces
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SYSNO ASEP 0340740 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Spatial coherence profilometry on tilted surfaces Author(s) Pavlíček, Pavel (FZU-D) RID, ORCID, SAI
Halouzka, M. (CZ)
Duan, Z. (JP)
Takeda, M. (JP)Source Title Applied Optics - ISSN 0003-6935
Roč. 48, č. 34 (2009), H40-H47Number of pages 7 s. Language eng - English Country US - United States Keywords tilted surface ; spatial coherence profilometry ; spatial coherence ; measurement error ; shape measurement Subject RIV BH - Optics, Masers, Lasers R&D Projects 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000272284600008 DOI 10.1364/AO.48.000H40 Annotation The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2010
Number of the records: 1