Number of the records: 1

Deposition of PZT thin films on copper-coated polymer foils

SYSNO ASEP	0337271
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Deposition of PZT thin films on copper-coated polymer foils
Title	Depozice PZT tenkých vrstev na poměděné polymerové folie
Author(s)	Suchaneck, G. (DE) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Dejneka, Alexandr (FZU-D)_{RID, ORCID} Kiselev, D. (PT) Bdikin, I. (PT) Kholkin, A. (PT) Gerlach, G. (DE)
Number of authors	8
Source Title	Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting). - Warrendale, PA : MRS, 2009 / Greer J.R. ; Vlassak J. ; Daniel J. ; Tsui T. - ISBN 9781615673834
Pages	i0305/1-i0305/2
Number of pages	2 s.
Action	Materials Research Society Fall Meeting
Event date	01.12.2008-05.12.2008
VEvent location	Boston
Country	US - United States
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	PZT on polymer-foils ; RF-modulated plasma jet system
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	GA202/08/1009 GA ČR - Czech Science Foundation (CSF)
	KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Annotation	In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2010

Number of the records: 1