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Planar Heating Element Adjusted by Electron Beam Micromachining
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SYSNO ASEP 0336802 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Planar Heating Element Adjusted by Electron Beam Micromachining Author(s) Dupák, Libor (UPT-D) RID, ORCID, SAI
Dupák, Jan (UPT-D) RIDNumber of authors 2 Source Title Elektrotechnica & Elektronica - ISSN 0861-4717
Roč. 44, 5-6 (2009), s. 82-84Number of pages 3 s. Language eng - English Country BG - Bulgaria Keywords electron beam machining ; heating element Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation This paper describes a planar heating element suitable for vacuum. The basis of this element is a ceramic plate with a thin layer of titanium deposited by magnetron sputtering. The copper contacts are brazed to the opposite edges of the plate for better connection of current supplies. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
Number of the records: 1