Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD

Fořt, Tomáš; Sobota, Jaroslav; Grossman, Jan; Bursíková, V.; Dupák, Libor; Peřina, Vratislav; Klapetek, P.; Buršík, Jiří

Number of the records: 1

Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD

1.

SYSNO ASEP	0336770
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD
Author(s)	Fořt, Tomáš (UPT-D)_{RID, ORCID, SAI} Sobota, Jaroslav (UPT-D)_{RID, ORCID, SAI} Grossman, Jan (UPT-D)_RID Bursíková, V. (CZ) Dupák, Libor (UPT-D)_{RID, ORCID, SAI} Peřina, Vratislav (UJF-V)_RID Klapetek, P. (CZ) Buršík, Jiří (UFM-A)_{RID, ORCID}
Number of authors	8
Source Title	ICPIG 2009 Conference Proceedings 29th International Conference on Phenomena in Ionized Gases. - Cancún : ICPIG2009 Local Organizing Committee, 2009 / de Urquijo J. - ISBN 978-1-61567-694-1
Pages	pb13-13:1-4
Number of pages	4 s.
Action	International Conference on Phenomena in Ionized Gases (ICPIG) /29./
Event date	12.07.2009-17.07.2009
VEvent location	Cancun
Country	MX - Mexico
Event type	WRD
Language	eng - English
Country	MX - Mexico
Keywords	PECVD ; diamond-like carbon coatings
Subject RIV	BL - Plasma and Gas Discharge Physics
R&D Projects	GA202/07/1669 GA ČR - Czech Science Foundation (CSF)
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
	AV0Z10480505 - UJF-V (2005-2011)
	AV0Z20410507 - UFM-A (2005-2011)
Annotation	Diamond-like carbon coatings with various doping were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The mechanical properties of prepared coatings were studied by means of depth sensing indentation technique. The dynamic impact wear tester has been used to evaluate the impact resistance of the prepared coatings. The tribological properties were studied using CSM pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx content enabled to minimize the intrinsic compressive stress in coatings.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2010

Number of the records: 1