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Titania seed layers for PZT thin film growth on copper-coated Kapton films

SYSNO ASEP	0336552
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Titania seed layers for PZT thin film growth on copper-coated Kapton films
Title	Zárodečné mezivrstvy oxidu titanu určené pro růst PZT vrstev na poměděných kaptonových foliích
Author(s)	Suchaneck, G. (DE) Volkonskiy, O. (DE) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Dejneka, Alexandr (FZU-D)_{RID, ORCID} Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Adolphi, B. (DE) Bertram, M. (DE) Gerlach, G. (DE)
Number of authors	8
Source Title	Integrated Ferroelectrics - ISSN 1058-4587 Roč. 108, č. 1 (2009), s. 57-66
Number of pages	10 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	copper coated Kapton ; seed layer ; seed layer ; plasma deposition ; XPS
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	GC202/09/J017 GA ČR - Czech Science Foundation (CSF)
	KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000271511000007
DOI	10.1080/10584580903324097
Annotation	n this work, we investigate the deposition of crystallization-promoting amorphous titania seed layers onto Cu-coated Kapton (R) HN foils for a subsequent PZT thin film fabrication thereon. Ultrathin TiO2-x layers with controlled stoichiometry were deposited by reactive sputtering at low substrate temperatures. X-ray photoelectron spectroscopy revealed that the Ti4+ ion in the seed layer was stable against Ar+ bombardment-induced reduction while CuO was reduced to Cu2O. Adsorbed moisture, organic solvents and carbon contaminations were quickly removed by Ar+ ion bombardment. (111)-textured PZT was fabricated on seed-layer-coated flexible substrates by means of a RF-modulated plasma jet system.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2010

Number of the records: 1