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Deposition of PZT Thin Films on Copper-Coated Polymer Foils-Challenges and Perspectives

SYSNO ASEP	0336530
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Deposition of PZT Thin Films on Copper-Coated Polymer Foils-Challenges and Perspectives
Title	Depozice PZT vrstev na poměděné polymerní substráty - výzvy a perspektivy
Author(s)	Suchaneck, G. (DE) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Dejneka, Alexandr (FZU-D)_{RID, ORCID} Guenther, M. (DE) Guenther, S. (DE) Meyer, B. (DE) Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Gerlach, G. (DE) Schultheiss, E. (DE)
Number of authors	9
Source Title	Ferroelectrics. - : Taylor & Francis - ISSN 0015-0193 Roč. 379, č. 1 (2009), s. 331-336
Number of pages	6 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	reactive sputter-deposition ; plasma-jet system ; hydrothermal method
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	GC202/09/J017 GA ČR - Czech Science Foundation (CSF)
	KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000265872000017
DOI	10.1080/00150190902851820
Annotation	In this work, the synthesis of (111)-textured PZT on Cu-coated polymer substrates is demonstrated by means of a RF-modulated plasma-jet system comprising a hollow cathode for reactive sputtering. Ion bombardment during film growth and lead stoichiometry are shown to be key parameters for the improvement of the PZT thin film quality.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2010

Number of the records: 1