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Metrological SPM with positioning controlled by green light interferometry

SYSNO ASEP	0335626
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Metrological SPM with positioning controlled by green light interferometry
Author(s)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Klapetek, P. (CZ) Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Šerý, Mojmír (UPT-D)_{RID, SAI}
Number of authors	6
Source Title	Fringe 2009 - 6th International Workshop on Advanced Optical Metrology. - Heidelberg : Springer, 2009 - ISBN 978-3-642-03050-5
Pages	s. 405-410
Number of pages	6 s.
Action	Fringe 2009 - International Workshop on Advanced Optical Metrology /6./
Event date	13.09.2009-16.09.2009
VEvent location	Nürtinger
Country	DE - Germany
Event type	WRD
Language	eng - English
Country	DE - Germany
Keywords	laser interferometry ; Nd:YAG laser
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO)
	FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO)
	2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	GA102/07/1179 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	Laser interferometry seems to be a solution not only due to its direct traceability to the fundamental etalon of length but also the incremental interferometer in its fringe counting mode gives an excellent dynamic range limited only by the fluctuations of the refractive index of air and offers nanometer or even subnanometer resolution over large range. We concentrated onto a small range flexture three-axis nanopositioning stage equipped with closed-loop motion control with capacitive sensors embedded in a frame with six-axes interferometric system supplied from a stabilized single-frequency frequency doubled 532 nm Nd:YAG laser.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2010

Number of the records: 1