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Scintillation secondary electron detector for variable pressure scanning electron microscope
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SYSNO ASEP 0335266 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Scintillation secondary electron detector for variable pressure scanning electron microscope Author(s) Čudek, P. (CZ)
Jirák, Josef (UPT-D) RID
Neděla, Vilém (UPT-D) RID, ORCID, SAINumber of authors 3 Source Title MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. - Graz : Verlag der Technischen Universität, 2009 - ISBN 978-3-85125-062-6 Pages vol. 1: 221-222 Number of pages 2 s. Action MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./ Event date 30.08.2009-04.09.2009 VEvent location Graz Country AT - Austria Event type WRD Language eng - English Country AT - Austria Keywords scintillation SE detector ; variable pressure SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation Detection of signal electrons at a higher pressure in the specimen chamber is commonly based on ionization and scintillation type of detectors. At the ionization detector secondary and backscattered electrons are amplified in the process of impact ionization of these electrons with atoms and molecules of gases in the specimen chamber. Electrons are subsequently detected by an electrode system of the detector. Voltage up to several hundred volts is added to the electrodes of the detector to give to secondary electrons and to electrons produced at ionization collisions sufficient energy needed for ionization of gases. Last versions of this detector utilize also magnetic field and detect preferentially secondary electrons. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2010
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