Number of the records: 1

Interferometric Nanoscale Comparator

SYSNO ASEP	0335249
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Interferometric Nanoscale Comparator
Author(s)	Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Šmíd, Radek (UPT-D)_{RID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID}
Number of authors	5
Source Title	MOC'09 - 15th Microoptics Conference. - Tokyo : Microoptics Group (OSJ/JSAP), 2009 - ISBN 978-4-86348-037-7
Pages	s. 218-219
Number of pages	2 s.
Action	MOC'09 - Microoptics Conference /15./
Event date	25.10.2009-28.10.2009
VEvent location	Tokyo
Country	JP - Japan
Event type	WRD
Language	eng - English
Country	JP - Japan
Keywords	interferometric nanocomparator ; laser interferometer
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO)
	FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO)
	2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	GA102/07/1179 GA ČR - Czech Science Foundation (CSF)
	GP102/09/P630 GA ČR - Czech Science Foundation (CSF)
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	Presented paper describes a novel portable interferometric nanocomparator for calibraring displacement sensors in precision industry. Digital quadrature detector with high resolution based on a digital signal controller is used for processing the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and results in sub-nanometer resolution and accuracy of the laser interferometer. High dynamic range of the measuring mirror displacement is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2010

Number of the records: 1