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Green Light Interferometry for Metrological SPM Positioning

SYSNO ASEP	0335098
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Green Light Interferometry for Metrological SPM Positioning
Author(s)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Klapetek, P. (CZ) Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Šerý, Mojmír (UPT-D)_{RID, SAI}
Number of authors	6
Source Title	MOC'09 - 15th Microoptics Conference. - Tokyo : Microoptics Group (OSJ/JSAP), 2009 - ISBN 978-4-86348-037-7
Pages	s. 232-233
Number of pages	2 s.
Action	MOC'09 - Microoptics Conference /15./
Event date	25.10.2009-28.10.2009
VEvent location	Tokyo
Country	JP - Japan
Event type	WRD
Language	eng - English
Country	JP - Japan
Keywords	scanning probe microscopy ; Nd:YAG laser ; green light interferometry
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO)
	FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO)
	2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	GA102/07/1179 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	We present an arrangement for dimensional metrology of nanostructures based on various techniques of scanning probe microscopy (SPM) combined with a precision positioning of a sample. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. Traceability of the position monitoring and control of the scanning stage is ensured by full six axes interferometric displacement measurements. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2010

Number of the records: 1