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Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems

SYSNO ASEP	0335019
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems
Title	Porovnávací studie celkové výkonové hustoty na substrát v pulzním DC magnetronovém výboji a v plazma-jetu s dutou katodou
Author(s)	Čada, Martin (FZU-D)_{RID, ORCID, SAI} Virostko, Petr (FZU-D) Kment, Štěpán (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Source Title	Plasma Processes and Polymers. - : Wiley - ISSN 1612-8850 Roč. 6, S1 (2009), S247-S252
Number of pages	6 s.
Action	International Conference on Plasma Surface Engineering /11./
Event date	15.09.2008-19.09.2008
VEvent location	Garmisch Partenkirchen
Country	DE - Germany
Event type	WRD
Language	eng - English
Country	DE - Germany
Keywords	calorimeter probe ; floating substrate ; magnetron ; plasma jet ; pulsed discharge
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000272302900050
DOI	10.1002/ppap.200930611
Annotation	The pulsed DC magnetron and hollow-cathode plasma jet sources have been studied from the point of view of total energy flux density at a ‘‘floating’’ substrate. Both plasma sources were operated under identical experimental conditions and differences between both systems were investigated. The aim of this work is focused on the characterization of total power density at electrically isolated substrate for various duty cycles and for different pulsing frequencies. A calorimeter probe with incorporated thermocouple junction was used for measurement of the total power density on the substrate. The main results from the calorimeter probe show clearly that total power density at the substrate is much higher for the planar magnetron operating at low duty cycle and high pulsing frequency than for the plasma jet. The total power density measured in the planar magnetron depends more strongly on the duty cycle and the pulsing frequency than measured in the plasma jet.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2010

Number of the records: 1