Number of the records: 1
RBS/channelling study of Er+ ion-implanted lithium niobate structure after an annealing procedure
- 1.
SYSNO ASEP 0332850 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title RBS/channelling study of Er+ ion-implanted lithium niobate structure after an annealing procedure Author(s) Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAI
Švecová, B. (CZ)
Nekvindová, P. (CZ)
Grotzschel, R. (DE)Number of authors 5 Source Title Abstract book, 19th International conference on Ion beam analysis. - Cambridge : IOP, Institute of physics, 2009 Number of pages 1 s. Action 19th International conference on Ion beam analysis Event date 07.09.2009-11.09.2009 VEvent location Cambridge Country GB - United Kingdom Event type WRD Language eng - English Country GB - United Kingdom Keywords Lithium niobate ; Erbium ; Ion implantation ; RBS/channelling Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders R&D Projects LC06041 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10480505 - UJF-V (2005-2011) Annotation Erbium-doped lithium niobate (Er:LiNbO3) is a prospective photonics component. We have focused on the structure of the Er:LiNbO3 layers, which are fabricated by 330 keV erbium ion implantation in the X, Z and two types of Y crystallographic cuts of LiNbO3 and annealed at 350°C to reconstruct the as-implanted layer and to avoid the evolution of Er precipitates. The depth distribution of the implanted Er was measured by Rutherford Backscattering Spectroscopy (RBS). The defect distribution and structural changes were described using the RBS/channelling method. The data obtained made it possible to reveal the relations between the crystallographic orientation of the implanted crystal and the during the restoration process. The deepest modified layer was observed in the perpendicular Y cut, which also exhibits the lowest reconstruction after annealing. The shallowest depth of modification and good recovery after annealing were observed in the Z cut of LiNbO3. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2010
Number of the records: 1