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Hybrid laser - magnetron technology for carbon composite coating

SYSNO ASEP	0330295
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Hybrid laser - magnetron technology for carbon composite coating
Title	Hybridní laser - magnetronová technologie pro kompozitní uhlíkové vrstvy
Author(s)	Jelínek, Miroslav (FZU-D)_{RID, ORCID} Kocourek, Tomáš (FZU-D)_{RID, ORCID, SAI} Kadlec, J. (CZ) Zemek, Josef (FZU-D)_{RID, ORCID}
Source Title	Laser Physics - ISSN 1054-660X Roč. 19, č. 2 (2009), 149-153
Number of pages	5 s.
Language	eng - English
Country	RU - Russian Federation
Keywords	SiC ; thin films ; PLD ; hybrid deposition ; composites
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	GA202/06/0216 GA ČR - Czech Science Foundation (CSF)
	GA202/07/0591 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
	AV0Z10100521 - FZU-D (2005-2011)
UT WOS	000263260200001
DOI	10.1134/S1054660X09020017
Annotation	Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2010

Number of the records: 1