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Space resolved optical emission spectroscopy during deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double hollow cathode plasma Jet system
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SYSNO ASEP 0326764 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system Title Prostorově rozlišená optická emisní spektroskopie během depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvojtryskového plazma-jet systému Author(s) Olejníček, Jiří (FZU-D) RID, ORCID
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Virostko, Petr (FZU-D)
Kment, Štěpán (FZU-D) RID, ORCID
Adámek, Petr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Dejneka, Alexandr (FZU-D) RID, ORCIDNumber of authors 8 Source Title Materials Science Forum - ISSN 0255-5476
Roč. 609, - (2009), s. 105-109Number of pages 5 s. Action International Conference on Thin Films and Porous Materials /1./ Event date 19.05.2008-22.05.2008 VEvent location Algiers Country DZ - Algeria Event type WRD Language eng - English Country CH - Switzerland Keywords BaxSr1-xTiO3 ; BSTO ; ferroelectric films ; hollow cathode ; optical emission spectroscopy Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA202/08/1009 GA ČR - Czech Science Foundation (CSF) KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000264750100016 DOI 10.4028/3-908454-02-6.105 Annotation Pulse modulated double hollow cathode RF plasma jet system with two separate independent nozzles made of BaTiO3 (BTO) and SrTiO3 (STO) was used for deposition of BSTO thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Space resolved optical emission spectroscopy (OES) was used mainly for monitoring of concentration of particles sputtered from the hollow cathode and for feedback correction of power supplied in both nozzles because applied power was responsible for sputtering speed of Ba and Sr particles. Main attention was focused on relation between ratio of spectral intensity of Ba, Ba+, Sr and Sr+ lines close to substrate and ratio of Ba and Sr concentration in the deposited film. 2D map of emission lines intensity distribution for Ba, Ba+, Sr, Sr+, Ti, Ar, and Ar+ for double hollow cathode plasma jet system with BTO and STO nozzles was created. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2010
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