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Interferometric Displacement Measurement for Local Probe Microscopy
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SYSNO ASEP 0325114 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Interferometric Displacement Measurement for Local Probe Microscopy Title Interferometrické měření polohy pro mikroskopii s lokální sondou Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Šerý, Mojmír (UPT-D) RID, SAINumber of authors 4 Source Title tm-Technisches Messen - ISSN 0171-8096
Roč. 76, č. 5 (2009), s. 253-258Number of pages 6 s. Language eng - English Country DE - Germany Keywords Interferometry ; local probe microscopy ; nanometrology Subject RIV BH - Optics, Masers, Lasers R&D Projects LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) IAA200650504 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000268616200007 DOI 10.1524/teme.2009.0965 Annotation In the contribution we present an interferometric displacement monitoring system for positioning of a sample stage for local probe microscopy. The arrangement is designed for metrology applications with direct link to fundamental etalon of length and monitoring of all six axes of freedom of motion. Active position of control is proposed. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2009
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