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Mechanical properties and structure of amorphous and crystalline B.sub.4./sub.C films

SYSNO ASEP	0322294
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Mechanical properties and structure of amorphous and crystalline B₄C films
Title	Mechanické vlastnosti a struktura amorfních a krystalických vrstev B₄C
Author(s)	Kulykovskyy, Valeriy (FZU-D)_RID Vorlíček, Vladimír (FZU-D)_RID Boháč, Petr (FZU-D)_{RID, ORCID} Čtvrtlík, Radim (FZU-D)_{RID, ORCID} Stranyánek, Martin (FZU-D) Deyneka, Alexander (FZU-D) Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Diamond and Related Materials. - : Elsevier - ISSN 0925-9635 Roč. 18, č. 1 (2009), 27-33
Number of pages	6 s.
Language	eng - English
Country	CH - Switzerland
Keywords	sputtering ; hardness ; elastic modulus ; boron carbide films
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	OC 097 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100520 - FZU-D (2005-2011)
UT WOS	000263229400005
DOI	10.1016/j.diamond.2008.07.021
Annotation	Amorphous and crystalline films were prepared by magnetron sputtering of hot-pressed B4C target. Hardness, elastic modulus, intrinsic stress and structure were investigated in dependence on the substrate bias and deposition temperature. Electron diffraction and Raman spectroscopy show amorphous structure for all the films deposited at temperatures below 900 °C. Crystalline B4C phase appears at T > 900 °C. The hardness and elastic modulus of the films deposited on unheated substrates decrease with increasing negative substrate bias. These variations correlate well with those observed for compressive stress, argon content in films and intensity of Raman spectra.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2009

Number of the records: 1