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Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. thin films by double RF hollow cathode plasma jet system
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SYSNO ASEP 0319065 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system Title Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody Author(s) Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Virostko, Petr (FZU-D)
Tichý, M. (CZ)
Čada, Martin (FZU-D) RID, ORCID, SAI
Adámek, Petr (FZU-D) RID, ORCID
Olejníček, Jiří (FZU-D) RID, ORCID
Deyneka, Alexander (FZU-D)
Churpita, Olexandr (FZU-D) RID, ORCID
Valvoda, V. (CZ)
Jastrabík, Lubomír (FZU-D) RID, ORCIDSource Title Contributions to Plasma Physics. - : Wiley - ISSN 0863-1042
Roč. 48, 5-7 (2008), s. 515-520Number of pages 6 s. Language eng - English Country DE - Germany Keywords BSTO ; ferroelectric films ; hollow cathode ; Langmuir probe ; optical emission spectroscopy ; plasma jet Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KJB100100707 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1QS100100563 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA202/06/0776 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000258126900022 DOI 10.1002/ctpp.200810083 Annotation Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns with STO and BTO nozzles. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2009
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