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Digital control of beams position in high-resolution interferometer for calibration of precise length sensors
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SYSNO ASEP 0316646 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Digital control of beams position in high-resolution interferometer for calibration of precise length sensors Title Číslicové řízení polohy svazků v interferometru s vysokým rozlišením pro kalibrace přesných délkových senzorů Author(s) Číp, Ondřej (UPT-D) RID, SAI, ORCID
Šmíd, Radek (UPT-D) RID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAISource Title NanoScale 2008 - 8th Seminar on Quantitative Microscopy (QM) and 4th Seminar on Nanoscale Calibration Standards and Methods. - Torino : Istituto Nazionale di Ricerca Metrologica, 2008 - ISBN N
S. 44Number of pages 1 s. Action NanoScale 2008 Event date 22.09.2008-23.09.2008 VEvent location Torino Country IT - Italy Event type WRD Language eng - English Country IT - Italy Keywords high resolution interferometry ; nanometrology Subject RIV BH - Optics, Masers, Lasers R&D Projects IAA200650504 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation In metrology applications of laser interferometers like a scale calibration of capacitive or inductive sensors, strictly linear positioning of the measuring mirror of the interferometer is necessary. It is maintained usually by a stage, which is based on principle of linear guide ways with ball carrier bearings. But possible imperfection of guides of the travel stage can cause deviations of the mirror plane from the right angle to the axis of traveling. Mentioned angle deviations lead to distortion of interference fringes in the output of the interferometer and by other words it causes non-linearity of the interferometer scale. We present a method, which eliminates the problem by a special configuration of the interferometer and continual monitoring of spatial position of beams in the interferometer when the mirror is positioned. It works with condition that the mirror can be slightly tilted by piezoelectric actuators in servo-loop mode with respect to detected spatial position. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2009
Number of the records: 1