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Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection

SYSNO ASEP	0316451
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection
Title	Ablační mikrostrukturování povrchu organického polymeru rentgenovým laserem
Author(s)	Mocek, Tomáš (FZU-D)_{RID, ORCID, SAI} Rus, Bedřich (FZU-D)_ORCID Kozlová, Michaela (FZU-D)_{RID, ORCID} Polan, Jiří (FZU-D) Homer, Pavel (FZU-D)_RID Juha, Libor (FZU-D)_{RID, ORCID, SAI} Hájková, Věra (FZU-D)_{RID, ORCID} Chalupský, Jaromír (FZU-D)_{RID, ORCID}
Source Title	Optics Letters. - : Optical Society of America - ISSN 0146-9592 Roč. 33, č. 10 (2008), s. 1087-1089
Number of pages	3 s.
Language	eng - English
Country	US - United States
Keywords	x-ray lasers ; laser ablation ; microstructuring
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	KAN300100702 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA202/05/2316 GA ČR - Czech Science Foundation (CSF)
	LC510 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	LC528 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	LA08024 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100523 - FZU-D (2005-2011)
UT WOS	000256520500018
DOI	10.1364/OL.33.001087
Annotation	We report on a single-shot micropatterning of an organic polymer achieved by ablation with demagnifying projection using a Ne-like Zn 21.2 nm soft x-ray laser. A nickel mesh with a period of 100 mu m was similar to 10x demagnified and imprinted on poly(methyl methacrylate) via direct ablation. The quality of the ablated microstructure was found to be mainly dependent on the quality of the projected mask. This first demonstration (to our knowledge) of single-shot projection, single-step lithography illustrates the potential of soft x-ray lasers for the direct patterning of materials with a resolution scalable down to submicrometer domain.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2009

Number of the records: 1