Advances in imaging and electron physics Vol. 128

Number of the records: 1

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SYSNO ASEP	0205712
Document Type	M - Monograph Chapter
R&D Document Type	Monograph Chapter
Title	Scanning low energy electron microscopy
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Advances in imaging and electron physics Vol. 128 / Hawkes P.. - New York : Elesevier Science, 2003
Pages	s. 309 - 443
Number of pages	134 s.
Language	eng - English
Country	US - United States
Keywords	scanning electron microscope ; low energy SEM ; low energy electron beams
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
CEZ	AV0Z2065902 - UPT-D
Annotation	Extensive review deals with principles of the scanning low energy electron microscopy in all important aspects starting from motivations to lower energy of electrons impinging on the specimen, including problems of interaction of slow electrons with the matter, emission yields, electron optical problems of formation low energy electron beams, detection issues, and general as well as specific questions of the instrumentation, and finishing with presentation of selected application results demonstrating capabilities of this microscopic mode.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2004

Number of the records: 1