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Detection of backscattered electrons in environmental scanning electron microscope
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SYSNO ASEP 0205650 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Detection of backscattered electrons in environmental scanning electron microscope Author(s) Autrata, Rudolf (UPT-D)
Jirák, Josef (UPT-D) RID
Wandrol, Petr (UPT-D)
Špinka, Jiří (UPT-D)Source Title Proceedings of the 6th Multinational Congress on Microscopy - European Extension / Milat O. ; Ježek D.. - Zagreb : Croatian Society for Electron Microscopy, 2003 Pages s. 489 - 490 Number of pages 2 s. Action MCEM Event date 01.06.2003-05.06.2003 VEvent location Pula Country HR - Croatia Event type EUR Language eng - English Country HR - Croatia Keywords collection angle ; signal level ; detector Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/01/1271 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z2065902 - UPT-D Annotation Impact of primary electrons causes generation of signals in the environmental scanning electron microscope (ESEM). These signals can be subsequently detected. Secondary and backscattered electrons are very often used to obtain information about the specimen. In ESEM secondary electrons are mostly detected by a ionisation detector, while backscattered electrons are detected by a scintillation detector. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2004
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