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Advances in Imaging and Electron Physics

SYSNO ASEP	0205556
Document Type	M - Monograph Chapter
R&D Document Type	Monograph Chapter
Title	Advances in scanning electron microscopy
Author(s)	Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Advances in Imaging and Electron Physics - ISSN 1076-5670
Pages	s. 327 - 373
Number of pages	46 s.
Language	eng - English
Country	US - United States
Keywords	scanning electron microscopy ; electron optics ; instrumens for study of surfaces
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GA202/99/0008 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z2065902 - UPT-D
Annotation	The monograph defines a configuration, construction and electron optical parameters of a standard scanning electron microscope and it defines and analyses new principals and approaches towards this standard. All aspects of the device are dealt with including the detection system, mechanization of the construction, vacuum and control electronics. The attention is devoted to new trends, which are: microscopy at higher pressure, microscopy byvery slow electrons and multi-channel signal detection.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2003

Number of the records: 1