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Advances in Imaging and Electron Physics

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    SYSNO ASEP0205556
    Document TypeM - Monograph Chapter
    R&D Document TypeMonograph Chapter
    TitleAdvances in scanning electron microscopy
    Author(s) Frank, Luděk (UPT-D) RID, SAI, ORCID
    Source TitleAdvances in Imaging and Electron Physics - ISSN 1076-5670
    Pagess. 327 - 373
    Number of pages46 s.
    Languageeng - English
    CountryUS - United States
    Keywordsscanning electron microscopy ; electron optics ; instrumens for study of surfaces
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    R&D ProjectsGA202/99/0008 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z2065902 - UPT-D
    AnnotationThe monograph defines a configuration, construction and electron optical parameters of a standard scanning electron microscope and it defines and analyses new principals and approaches towards this standard. All aspects of the device are dealt with including the detection system, mechanization of the construction, vacuum and control electronics. The attention is devoted to new trends, which are: microscopy at higher pressure, microscopy byvery slow electrons and multi-channel signal detection.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2003

Number of the records: 1