Number of the records: 1
Xenon capillary discharge as a source of soft X-ray
- 1.
SYSNO ASEP 0179037 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Xenon capillary discharge as a source of soft X-ray Author(s) Vrba, Pavel (UFP-V) RID
Vrbová, M. (CZ)Source Title Czechoslovak Journal of Physics. - : Springer - ISSN 0011-4626
Roč. 52, supplement D (2002), s. 112-116Publication form CD-ROM - CD-ROM Action Symposium on Plasma Physics and Technology/20th./ Event date 10.06.2002-13.06.2002 VEvent location Prague Country CZ - Czech Republic Event type EUR Language eng - English Country CZ - Czech Republic Keywords capillary discharge, soft X-ray Subject RIV BL - Plasma and Gas Discharge Physics CEZ AV0Z2043910 - UFP-V Annotation A novel type of capillary discharge device was demonstrated to obtain soft X-ray emission compplying with the demand for the future micro lithography[1].Experiments with the Xenon filled capillary lead to generation of incoherent radiation in the spectral region (13ö14)nm.We have done a theoretical analysis of the experiment based on previous work[2]. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2003
Number of the records: 1