Number of the records: 1
CN.sub.x./sub. coatings deposited by pulsored RF supersonic plasma jet: hardness, nitrogenation and optical properties
- 1.
SYSNO ASEP 0133425 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title CNx coatings deposited by pulsored RF supersonic plasma jet: hardness, nitrogenation and optical properties Author(s) Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Šícha, Miloš (FZU-D)
Pajasová, Libuše (FZU-D) RID
Soukup, Ladislav (FZU-D)
Jastrabík, Lubomír (FZU-D) RID, ORCID
Chvostová, Dagmar (FZU-D) RID, SAI, ORCID
Wagner, T. (DE)Source Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
142-144, - (2001), s. 681-687Number of pages 7 s. Language eng - English Country NL - Netherlands Keywords carbon nitrides ; plasma-chemical deposition ; tribology ; optical properties Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA202/00/1592 GA ČR - Czech Science Foundation (CSF) LN00A015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z1010914 - FZU-D Annotation A low pressure pulsed RF supersonic plasma jet system (RPJ) has been used for deposition of CNx thin films. The aim of the CNx thin films deposition was an application for tribological coatings. Chemical composition, mechanical and optical properties of deposited CNx films have been measured. The mechanism of CNx formation has been studied as well. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2002
Number of the records: 1