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The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor

  1. 1.
    SYSNO ASEP0131012
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JOstatní články
    TitleThe interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor
    Author(s) Šícha, M. (CZ)
    Hubička, Z. (CZ)
    Tichý, M. (CZ)
    Novák, Miloš (FZU-D)
    Soukup, Ladislav (FZU-D)
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Behnke, J. F. (DE)
    Kapička, V. (CZ)
    Kapoun, K. (CZ)
    Šerý, M. (CZ)
    Source TitleContributions to Plasma Physics. - : Wiley - ISSN 0863-1042
    Roč. 36, č. 5 (1996), s. 605-611
    Languageeng - English
    CountryDE - Germany
    R&D Projects0659 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing1997

Number of the records: 1  

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