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Contrast at Very Low Energies of the Gold/Carbon Specimen for Resolution Testing

SYSNO ASEP	0100008
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Contrast at Very Low Energies of the Gold/Carbon Specimen for Resolution Testing
Title	Kontrast při velmi nízkých energiích u vzorku zlato/uhlík pro testování rozlišení
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Scanning - ISSN 0161-0457 Roč. 25, 18/24 (2004), s. 18-24
Number of pages	7 s.
Language	eng - English
Country	US - United States
Keywords	scanning electron microscope ; very low energy ; cathode lens
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	IAA1065304 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
Annotation	This paper concerns the problem of testing the image resolution in scanned electron micrographs, namely from the point of view of the image contrast for the standard gold/carbon test specimen within the full energy scale, down to eV units. Microscopes equipped with a cathode lens are considered and experimental results are presented for three devices differing in vacuum conditions and fields surrounding the specimen. At very low energies, the contrast is shown to either invert or disappear and this ambiguity is discussed and confronted with data simulated on the basis of measured electron yields from gold and carbon. It is concluded that the observations can be explained in terms of the surface cleanliness and strength of in the surrounding fields
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2005

Number of the records: 1