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Cathode Lens Mode in the Scanning Electron Microscope

SYSNO ASEP	0049017
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Cathode Lens Mode in the Scanning Electron Microscope
Title	Režim katodové čočky v rastrovacím elektronovém mikroskopu
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 10th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : ISI AS CR, 2006 / Müllerová I. - ISBN 80-239-6285-X
Pages	s. 49-52
Number of pages	4 s.
Action	Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /10./
Event date	22.05.2006-26.05.2006
VEvent location	Skalský dvůr
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	cathode lens mode ; SEM ; very slow electrons
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GA102/05/2327 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	Electron optical characteristics of the cathode lens mode, enabling one to decelerate the electron beam bombarding the specimen in a scanning electron microscope down to arbitrarily low energies, are summarized. Contrast mechanisms appearing at very low energies below 100 eV are described, together with detection strategies capable of acquiring these contrasts. Illustration examples are provided.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2007

Number of the records: 1