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RF Hollow Cathode Plasma Jet Deposition of Ba.sub.x./sub.Sr.sub.1-x./sub.TiO.sub.3./sub. Films
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SYSNO ASEP 0027161 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title RF Hollow Cathode Plasma Jet Deposition of BaxSr1-xTiO3 Films Title Depozice vrstev BaxSr1-xTiO3 pomocí RF plasmové trysky Author(s) Ianno, N.J. (US)
Soukup, R. J. (US)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Olejníček, Jiří (FZU-D) RID, ORCID
Šíchová, Hana (FZU-D)Source Title Materials, Integration and Technology for Monolithic Instruments. - Pittsburgh : Warendale, PA, 2005 / Theil A.J. ; Bohm M. ; Gardner S.D. ; Blalock T. - ISBN 1-55899-823-3 Pages d2.4.1-d2.4.6 Number of pages 6 s. Action MRS Spring Meeting Event date 28.03.2005-01.04.2005 VEvent location San Francisco Country US - United States Event type WRD Language eng - English Country US - United States Keywords BSTO thin films ; hollow cathode ; emission spectroscopy Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects KJB1010302 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) Annotation An initial study of the RF hollow cathode plasma jet deposition of BaxSr1ـxTiO3 has been performed. Deposition occurred from a single composite nozzle consisting of BaTiO3 and SrTiO3 at substrate temperatures on the 500-550°C range. It has been shown that film composition can be easily controlled by the nozzle composition as well as other deposition parameters. The as-deposited films exhibit clear BSTO peaks with grain size on the order of 30 nm Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2006
Number of the records: 1