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Some mechanical properties of DLC and CN.sub.x./sub. coatings deposited by reactive sputtering or plasma-chemical techniques
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SYSNO ASEP 0024671 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Some mechanical properties of DLC and CNx coatings deposited by reactive sputtering or plasma-chemical techniques Title Některé mechanické vlastnosti povlaků DLC a CNx deponovaných reaktivním naprašováním a plasmo-chemickými metodami Author(s) Boháč, Petr (FZU-D) RID, ORCID
Kulikovsky, V. Y. (UA)
Šícha, M. (CZ)Source Title Proceedings of the COST 516 Tribology Symposium /3./. - Eibar : Fundatión TEKNIKER, 2000 / Igartua A. ; Alberdi A. - ISBN 84-699-2557-1 Pages s. 117-125 Number of pages 9 s. Action COST 516 Tribology Symposium Event date 15.05.2000-19.05.2000 VEvent location Eibar Country ES - Spain Event type WRD Language eng - English Country ES - Spain Keywords amorphous films a-C, a-C:H, Ti-C:H, and CNx ; mechanical and tribological properties ; intrinsic stress evolution ; adhesion Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects OC 516.50 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z1010914 - FZU-D Annotation Some results of research of mechanical and tribological proper-ties of amorphous films a-C, a-C:H, Ti-C:H, and CNx are described in this paper. Although not stoichiometric (x = N/C < 1.33) demonstrated CNx films interesting tribological properties and high hardness. It has been given attention also to intrinsic stress evolution and adhesion (delamination) of these coatings which are belonging to limiting factors to utilize them in practice Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2006
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