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Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons

SYSNO ASEP	0022381
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Modulation transfer function and detective quantum efficiency of electron bombarded charge coupled device detector for low energy electrons
Title	Modulační přenosová funkce a detekční kvantová účinnost elektrony bombardovaného CCD detektoru elektronů s nízkou energií
Author(s)	Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI}
Source Title	Review of Scientific Instruments. - : AIP Publishing - ISSN 0034-6748 Roč. 76, č. 9 (2005), 093704:1-6
Number of pages	6 s.
Language	eng - English
Country	US - United States
Keywords	electron bombarded CCD ; modulation transfer function ; detective quantum efficiency
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GA202/03/1575 GA ČR - Czech Science Foundation (CSF)
UT WOS	000232034400033
DOI	10.1063/1.2018587
Annotation	The use of a thinned back side illuminated charge coupled device chip as two-dimensional sensor working in direct electron bombarded mode at optimum energy of the incident signal electrons is demonstrated and the measurements of the modulation transfer function (MTF) and detective quantum efficiency (DQE) is described. The MTF was measured for energy of electrons 4 keV using an edge projection method and a stripe projection method. The decrease of the MTF for a maximum spatial frequency of 20.8 cycles/mm is 0.75 - 2.5 dB, and it is approximately the same for both horizontal and vertical directions. DQE was measured using an empty image and the mixing factor method. Empty images were acquired for energies of electrons from 2 to 5 keV and for various doses, ranging from nearly dark image to a nearly saturated one. DQE increases with increasing energy of bombarded electrons and reaches 0.92 for electron energy of 5 keV.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2006

Number of the records: 1