Number of the records: 1
RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films
- 1.Dřínek, Vladislav - Strašák, Tomáš - Novotný, F. - Fajgar, Radek - Bastl, Zdeněk
RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films.
Applied Surface Science. Roč. 292, FEB 15 (2014), s. 413-419. ISSN 0169-4332. E-ISSN 1873-5584
Impact factor: 2.711, year: 2014
http://hdl.handle.net/11104/0230464
Number of the records: 1