Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO.sub.2./sub./TiO.sub.2./sub./IrO.sub.2./sub. capacitors

Maier, F.J. - Schneider, M. - Artemenko, Anna - Kromka, Alexander - Stoeger-Pollach, M. - Schmid, U.
Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO₂/TiO₂/IrO₂ capacitors.
Journal of Applied Physics. Roč. 131, č. 9 (2022), č. článku 095301. ISSN 0021-8979. E-ISSN 1089-7550
OECD category: Electrical and electronic engineering
Impact factor: 3.2, year: 2022
Method of publishing: Open access
https://hdl.handle.net/11104/0334300