Number of the records: 1
Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target
- 1.Hippler, Rainer - Čada, Martin - Straňák, Vítězslav - Hubička, Zdeněk
Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target.
Plasma Sources Science & Technology. Roč. 28, Nov (2019), s. 1-13, č. článku 115020. ISSN 0963-0252. E-ISSN 1361-6595
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.193, year: 2019
Method of publishing: Open access
http://hdl.handle.net/11104/0303898
Number of the records: 1